1) An air supply unit to be used for the photo line in the semiconductor and LED manufacturing processes (THC : Temperature & Humidity Control Unit)
2) A specially designed temperature and humidity control unit with high precision (±0.05°C/±0.25%)
3) Highly pure air can be supplied through the particle and chemical filters (Optional)
4) The materials to be arranged inside are specially designed materials that will prevent particles of materials from being generated
5) Large scale THCs can be designed and supplied
6) Interface with the main unit is provided (Standard: RS-232)
Relation Images
1. SUS for the exterior metal plate (Default: SPC coating)
2. Particle and chemical (NH3) filters are installed
3. Interface: RS-232 (including the standard type), RS-485 and analog and digital communications
4. Safety certification: Including UL, CE, SEMI S2 and S-mark
| Model | DETHC-803 |
|---|---|
| Temperature Range(°C) | 21.00°C ~ 25.00°C |
| Temperature Stability | ±0.05°C |
| HumidityControlRange | 40.00%RH ~ 50.00%RH |
| Humidity Stability | ±0.025%RH |
| Air Supply Volume | 8m³/min |
| Cooling Method | Water Cooling |
| Cooling Water Requirement | >10lpm |
| Power Requirement | 220VAC, 50/60Hz, 5.3KW |
| Dimension(mm) | 500(W) x 800(D) x 1,100(H) |